Autonomous Microchip Exploiting the Gas Solubility in PDMS
نویسندگان
چکیده
منابع مشابه
On gas permeation in PDMS
A theoretical model of gas permeation in polydimethylsiloxane (PDMS) is conducted for two prior works involving MEMS sensors and actuators. The issue for modeling a sensor is about using PDMS slabs to replace Pyrex glass as the packaging substrate for bulk-micromachined pressure sensors. The leakage pressure due to gas permeation in PDMS reveals the time-varying behavior of exponential decay. T...
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ژورنال
عنوان ژورنال: Kobunshi
سال: 2005
ISSN: 0454-1138,2185-9825
DOI: 10.1295/kobunshi.54.562